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Semiconductor specific multi-channel temperature control equipment

Mainly used for precise temperature control of multiple reaction chambers in semiconductor processes, the device consists of a heat exchanger, a circulating pump, a compressor, and a control system. Advanced control algorithms are used to improve the stability, temperature control accuracy, and reaction speed of the chiller. The temperature control accuracy can reach ± 0.5 ℃ under load conditions, and can be controlled arbitrarily between -20 ℃ and 85 ℃, with good temperature stability.

The products are divided into:
1. Single channel series
2. Dual channel series
3. Three channel system

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ADVANTAGE

products

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See the parameters clearly

Name

  • Single channel series
  • temperature range
  • accuracy
  • Cooling capacity
  • Heating capacity
  • flow
  • Port size
  • temperature range
  • Required traffic
  • Port size
  • Import pressure
  • Dual channel series
  • temperature range
  • accuracy
  • Cooling capacity
  • Heating capacity
  • flow
  • Port size
  • temperature range
  • Required traffic
  • Port size
  • Import pressure
  • Three channel series
  • temperature range
  • accuracy
  • Cooling capacity
  • Heating capacity
  • flow
  • Port size
  • temperature range
  • Required traffic
  • Port size
  • Import pressure



Parameter

  • -20℃~+80℃
  • ±0.1℃
  • 2kw@-10℃
  • 3kw
  • 20LPM@0.6MPa
  • Rc3/4"
  • 15~20°C
  • 15LPM
  • Rc1/2"
  • 0.3~0.7MPa

  • -45℃~+40℃
  • ±0.2℃
  • 11kw@-20℃/5kw@-40℃
  • 2kw
  • 17LPM@0.6MPa
  • Rc3/4"
  • 15~20°C
  • 30LPM
  • Rc1/2"
  • 0.3~0.7MPa

  • -20℃~+50℃
  • ±0.1℃
  • 15kw@-10℃
  • 2kw
  • 30LPM@0.85MPa
  • Rc3/4"
  • 15~20°C
  • 30LPM
  • Rc3/4"*2
  • 0.3~0.7MPa



Product recommendations

Using a set of cooling heat exchangers and a set of heating heat exchangers, the proportion control valve is used to control the heat and cold entering the heat exchanger, and then the unified medium is input into the reactor jacket for heat exchange and temperature control. The system is equipped with an expansion tank.

Secondary heat exchange TCU solution
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Integrate existing thermal energy (such as steam, cooling water, and ultra-low temperature liquids) into a single fluid system or secondary circuit used to control the temperature of process equipment, forming a non-contact temperature control system for a single heat conduction liquid in the reaction vessel jacket

Direct TCU solution
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In the product development and production processes of the chemical and pharmaceutical industries, temperature control is crucial for safe and high-quality reaction products. Putec's PTHC series is suitable for process industry and process engineering, and is applied to dynamic constant temperature control of cold and heat sources such as jacket reactors, microchannel reactors, reaction devices, combined chemistry, as well as low-temperature distillation, distillation, extraction and other equipment in the pharmaceutical industry.

High precision high and low temperature integrated machine
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Applied to reliability tests such as characteristic analysis of components, high and low temperature temperature variation testing, temperature shock testing, failure analysis, etc

Semiconductor device high and low temperature testing equipment
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SERVICE

service

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Proteco Services

Free door-to-door delivery nationwide: The delivery time varies from 5-7 days in various provinces of northwest, northeast, and southwest. Due to uncertain factors, the delivery time in some places is more than 7 days, while in other provinces it is 3-5 days. The delivery time in Jiangsu, Zhejiang, and Shanghai is 1-2 days

We do not make any promises regarding transportation time. In the event of holidays, rain, snow, heavy fog, etc., there may be occasional delays in logistics transportation, which is beyond the manufacturer's control. Please understand.

  • Complete order
  • Print invoice
  • Packaging and packing
  • Free logistics
  • Free installation/debugging
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2880680455

Telephone

182 2161 6900